Facilities
IMM Bologna Institute is equiped with a complete range of facilities that allow a global approach to the microelectronics and MEMS research activities. A wide range of equipment is available in the institute, both for matherials and processes investigation than for system architecture, design, technological realization and characterization of devices.
In the following the main category facilities inside wich you can find a detailed list of the equipments with a short description and main fatures.
- Clean Room
- Design and Simulation Facilities
- Technological Facilities
- Available Technological Processes
- Packaging Facilities
- Structural Characterization Facilities
- Ion Beam Facilities
- Electrical Characterization Facilities
- Optical Characterization Facilities
- Sensors and Microsystems Characterization Facilities