Sensors and Microsystems
Since several years, the IMM - Section of Bologna is involved in this rapidly expanding research sector, aiming at developing multifunctional miniaturized systems integrating std. standard electronic signal processing and chemical, optical and mechanical devices. A fundamental issue is represented by the development of basic micromachining technologies (bulk, surface and wafer bonding) for the realization of three-dimensional micrometric structures relying on the excellent mechanical properties of Silicon (and other peculiar materials) and the know-how resulting from microelectronic technologies.
The use of microsystems technologies allows to address the miniaturization and integration of different sensing/actuating capabilities into a single system, having new functionalities, small dimensions, low power consumption as well as low cost.
The activities were mainly focused on the design, realization and characterization of multisensorial microsystems based on solid state devices for air quality monitoring. Indoor and outdoor applications of these devices are very promising from the industrial point of view due to the increasing concerns about life quality and health care. The considered transduction and phisical principle are both chemical and optical.
Microsystems able to perform analysis of complex gaseous mixtures has been also been used to perform food quality assesment.
Recently a reserch activity on strain sensors has started.
In the following a list of research activities is reported.
Details on each research activity can be found in a specific page linked to the respective title.