Lumonics PM 880 Laser
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Laumanics PM 880 consists in a excimer laser equiped with 2 chamber for Palsed Laser Ablation, Pulsed Laser Deposition and Deep UV Photolitography.
Laser has the following characteristics:
- Maximum energy 850 mJ
- Repetition rate single shot - 100 Hz
- Minimum and maximum voltage 25 kV - 35 kV
- Gas misture KrF (fill%: F2 0,07; Kr 1,2; Ne balance)
- Total fill pressure 5000 mbar
- Clean room environment (100000 class)