INTRODUCTION
The laboratory is dedicated to the doping of semiconductor wafers by ion implantation at high energy |
HIGH ENERGY ION IMPLANTATOR | |
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MANUFACTURER: 1.7MV HV-TANDETRON 4117HC
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PROCESSES
MEMS ACCELEROMETER BASED ON n- AND p-TYPE SILICON PIEZORESISTORS | SEM IMAGE OF A 4,6 um HIGH LiNbO3 RIDGE CROSS SECTION AFTER 5 MeV Cu+ IMPLANTATION AND HF ETCHING |
FOR MORE INFORMATION VISIT THE SMEDIP PROJECT HOME PAGE |
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SILICON CARBIDE | SPAD (SINGLE PHOTON AVALANCHE DIODE) |
FOR MORE INFORMATION VISIT POWER AND HIGH FREQUENCIES DEVICES HOME PAGE |
FOR MORE INFORMATION VISIT OPTOELECTRONICS HOME PAGE |
CONTACT PERSON: MICHELE BELLETTATO
MICRO/NANO FABRICATION HOME PAGE |