1950° C Annealing of Al+ Implanted 4H-SiC: Sheet Resistance Dependence on the Annealing Time | Bologna UNIT

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1950° C Annealing of Al+ Implanted 4H-SiC: Sheet Resistance Dependence on the Annealing Time

Type:

Journal

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

24 Jun 2016

Authors:

Roberta Nipoti, Antonella Parisini, Salvatore Vantaggio, Giovanni Alfieri, Alberto Carnera, Emanuele Centurioni, Ivan Elmi, Ulrike Grossner

Biblio References:

Volume: 858 Pages: 523-526

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…