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The paper reports on the fabrication and characterization of high-resolution strain sensors for structural materials based on Silicon On Insulator flexural resonators manufactured by polysilicon Low-Pressure Chemical Vapour Deposition vacuum packaging. The sensors present sensitivity of 164 Hz/με and strain resolution limit of 150 pε on steel for a measurement time of 315 ms, in both tensile and compressive strain regimes. The readout of the sensor is implemented with a transimpedance oscillator circuit implemented on Printed Circuit Board, in which a microcontroller-based reciprocal frequency counter is integrated. The performance of the sensors on steel are investigated for measurement bandwidths from 1.5 to 500 Hz and a comparison with conventional metal strain gauges is proposed.
Publication date: 
1 Mar 2016

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Luca Masini, Jize Yan, Ashwin A Seshia, Kenichi Soga, Alberto Roncaglia

Biblio References: 
Volume: 239 Pages: 90-101
Sensors and Actuators A: Physical