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In the case of Al+ implanted 4H-SiC, a post implantation annealing temperature of 1950 C has the beneficial effect of maximizing both the electrical activation of implanted Al and the reordering of the lattice damaged by the Al ions. However, the formation of extended defects in the implanted layers and that of carbon vacancies in the n-type epi-layers below the implanted layers may be hardly avoided. This study contains the results of structural and electrical investigation showing that:(i) on increasing the implanted Al concentration different type of extended defects form and grow;(ii) a strong anisotropic hole transport occurs when the Al implanted surface layer is confined by and contains stacking faults. This study also reports experimental and simulated values of the area and the perimeter components of the current density of Al+ implanted 4H-SiC pin diodes. The simulations show that these components may be, at …
IOP Publishing
Publication date: 
22 Sep 2016

Roberta Nipoti, Antonella Parisini, Giovanna Sozzi, Maurizio Puzzanghera, Andrea Parisini, Alberto Carnera

Biblio References: 
Volume: 5 Issue: 10 Pages: P621
ECS Journal of Solid State Science and Technology