The carbon vacancy (V C) is perhaps the most prominent point defect in silicon carbide (SiC) and it is an efficient charge carrier lifetime killer in high-purity epitaxial layers of 4H-SiC. The V C concentration needs to be controlled and minimized for optimum materials and device performance, and an approach based on post-growth thermal processing under C-rich ambient conditions is presented. It utilizes thermodynamic equilibration and after heat treatment at 1500 C for 1 h, the V C concentration is shown to be reduced by a factor~ 25 relative to that in as-grown state-of-the-art epi-layers. Concurrently, a considerable enhancement of the carrier lifetime occurs throughout the whole of> 40 µm thick epi-layers.
23 Jul 2018
Volume: 86 Issue: 12 Pages: 91