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We introduce a novel method for the analysis of the dependence of the optical parameters of Hydrogenated Silicon–rich Carbide (SRC:H) on the alloy composition by using a ternary–3D diagram. The SRC:H samples were fabricated using the very high frequency (VHF) plasma enhanced chemical vapor deposition technique. The composition is given as Si%+C%+H% = 100, with the carbon fraction Cf = C%/(C%+Si%) varying between 0.18 and 0.72. The actual composition was determined by Rutherford Back Scattering analysis. The optical constants are determined by means of Reflectance and Transmittance UV–visible spectroscopy, and are modeled by means of the Jellison–Tauc–Lorentz–with Gaussian Band Tail model. The unique properties of the ternary–3D diagram give unexpected insight on the origin of the dependence of optical properties on composition. It is shown that the wavelength position of the …
Publication date: 
17 Sep 2018

C Summonte, F Gaspari, S Quaranta, R Rizzoli, E Centurioni, M Canino, AY Polliotti, M Bianconi, A Desalvo

Biblio References: 
Materials Chemistry and Physics