The reliable production of innovative nanoelectronic devices requires continuous, real-time in-line control. The metrology tools required to accurately characterise products at the relevant scales of one to hundreds of nanometres have yet to be developed. State-of-the-art spectroscopy techniques (such as Raman, infrared and photoluminescence spectroscopy) that map physical observables at the nanoscale lack sufficient resolution for a detailed characterisation of nanodevices. The CHALLENGES project will improve both the spatial resolution and the signal-to-noise ratio of these techniques by exploiting the optical phenomenon of localised surface plasmon resonance.
CHALLENGES project aims to develop innovative Non-Destructive Techniques (NDTs) for reliable inline multiscale measurements down to the nanoscale, and fully compatible with different factory environments. The developed metrology technologies will enable the increase of speed, resolution, sensitivity, spectral range and compatibility within different nano-related production environments, finally improving products performance, quality and reliability, with the consequent bosting of competitiveness. It will provide a non-destructive approach based on the use of multipurpose nano-optical techniques to enable a reliable real-time nano-scale characterization in the factory floor, using plasmonic enhanced Raman, InfraRed (IR) and Photoluminescence signals.
CHALLENGES will focus on development and demonstration of such technology on three relevant application contexts: Semiconductor Industry, Si Photovoltaics and 2D Materials.
Updated project results can be found here
Coordinator: Università degli Studi di Roma La Sapienza
Partners: Applied Materials Italia Srl, Bewarrant, Commissariat à l’Energie atomique et aux energies alternatives, Consiglio Nazionale delle Ricerche, Graphenea Semiconductor Sl, Interuniversitair Micro-Electronica Centrum, Lfoundry Srl, Nanonics Imaging Ltd, Nova Ltd, Physikalisch-Technische Bundesanstalt, Scansens Gmbh, Sol Instruments Ltd, Stmicroelectronics Crolles 2 Sas, Tiberlab S.R.L, Warrant Hub Spa (Third Party)
IMM Contact person: Vittorio Morandi
Funder under: European Commission H2020