Origin: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Simone Sugliani, Pietro De Nicola, Giovanni Battista Montanari, Alessio Nubile, Angela Menin, Fulvio Mancarella, Paolo Vergani, Andrea Meroni, Marco Astolfi, Marco Borsetto, Guido Consonni, Roberto Longone, Marco Chiarini, Marco Bianconi, Gian Giuseppe Bentini
2013-03-09
Biblio references: Volume: 8612 Pages: 86120E
Origin: Micromachining and Microfabrication Process Technology XVIII