E Hourdakis, AG Nassiopoulou, A Parisini, MA Reading, JA Van Den Berg, L Sygellou, S Ladas, P Petrik, A Nutsch, M Wolf, G Roeder
Biblio references: Volume: 29 Issue: 2 Pages: 022201
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena