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MEMS sensors fabricated by micromachining of Silicon-On-Insulator substrates.

Silicon-On-Insulator (SOI) wafers with device layer thickness in the range 2-25 µm are employed for the fabrication of physical sensors for strain, pressure and temperature. The...

Electronic and optical properties of novel materials

The modelling and computational expertise that can be found in the Bologna unit reflects the different types of approach that are used to corroborate different activities that...

Synthesis of Advanced Materials at Bologna Unit

The long standing experience on the synthesis of materials for electronic applications of IMM Bologna has been devoted to the development of different CVD type of equipment and methodologies for...

Quantum Cryptography Microsystem, Optical Computing and Hyperspectral Imaging

The research activity is organized on two main topics: (1) Quantum Cryptography Microsystem integrated on LiNbO3 and (2) Programmable Micro Diffracting Grating (PMDG) integrated on LiNbO3 for...

Graphene-based materials for energy conversion and storage

 

The research activity focuses on two types of materials. On one side, the capabilities of functional nanoparticles and quantum dots integration with...

Graphene and graphene-based materials for flexible electronics and wearable sensing applications

 

The activity is following two different routes. On one side it is focused on the growth of graphene membranes by means of Chemical Vapor Deposition (...

Structural, compositional and functional properties of nanostrucutred materials: characterization and modeling

 

The research activity is mainly focused on two main topics: (i) the characterization of structural, compositional and functional properties of...

Analytical gas multi-sensing systems based on MEMS microfluidic devices

To perform reliable analyses of real-world gas samples, a very high selectivity is necessary to avoid false signals provided by interferents in the complex sample matrix. In most cases, especially...

MEMS-based ultra-low power gas sensors and detectors

IMM Bologna has a strong expertise in miniaturization of metal-oxide gas sensors (MOX sensors). The approach targets high-TRL prototypes by developing full wafer-level production processes of...

TEM/CBED strain measurement in devices

The mechanical strain in crystals affects their physical, electronic, optical and magnetic properties. In micro- and nano-electronic industry, the study of strain accumulated during the...

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