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Functional Materials and Devices

Exploiting the cutting-edge proprieties of novel functional materials and microstructures requires the transfer of the new materials and technologies to the device level. This is pursued by relying on the multidisciplinary capabilities available at the IMM Unit in Bologna, spanning from material science and characterization techniques to engineering capabilities in device and process design, packaging, and development of control and communication electronics.

Smart Systems Integration activities aim at demonstrating sensing and actuating systems based on nanostructured materials and microsystem devices, by bridging the gap between the phenomena occurring at the micro- and nanoscale and the real-world of the final user.

Activities include the development of Functional Nanostructured Materials, of Micro-Electro-Mechanical-Systems (MEMS) and Micro-Opto-Electro-Mechanical-Systems (MOEMS), of chemical and physical sensors, as well as the development and prototyping of multifunctional micro- and nanosystems. Many of the IMM Bologna developments in the field of functional materials and devices reach a high technology readiness level (TRL6-7), demonstrating the functionality of the proposed systems in an operational environment. The final goal is the technology transfer towards regional, national and European industries.

Graphene-based sensors

 

At IMM Bologna, the research activity on sensoristics exploiting the properties of C-CVD grown graphene (G), in form of membranes with crystalline domains with 1 to 4 layers or of 3D...

Si and C based nanostructured materials: synthesis and material properties

 

C based nanostructured materials (1D to 3D)

The research activity at IMM Bologna Unit is mainly focused on the C-CVD synthesis of the following materials and...

MOMS fiber-optic transducers

 

Micro-Opto-Mechanical devices for various applications are fabricated by mounting micromachined structures, obtained from bulk silicon wafers by Deep...

MEMS devices for thermoelectric micro-energy harvesting based on top-down semiconductor nanowires

 

Polycrystalline silicon nanowires fabricated with top-down technology are utilized as thermoelements in MEMS devices used for micro energy conversion or thermoelectric...

MEMS sensors fabricated by micromachining of Silicon-On-Insulator substrates.

Silicon-On-Insulator (SOI) wafers with device layer thickness in the range 2-25 µm are employed for the fabrication of physical sensors for strain, pressure and temperature. The...

Structural, compositional and functional properties of nanostrucutred materials: characterization and modeling

 

The research activity is mainly focused on two main topics: (i) the characterization of structural, compositional and functional properties of...

Analytical gas multi-sensing systems based on MEMS microfluidic devices

To perform reliable analyses of real-world gas samples, a very high selectivity is necessary to avoid false signals provided by interferents in the complex sample matrix. In most cases, especially...

MEMS-based ultra-low power gas sensors and detectors

IMM Bologna has a strong expertise in miniaturization of metal-oxide gas sensors (MOX sensors). The approach targets high-TRL prototypes by developing full wafer-level production processes of...