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The hole transport properties of heavily doped 4H-SiC (Al) layers with Al implanted concentrations of 3× 10 20 and 5× 10 20 cm− 3 and annealed in the temperature range 1950–2100 C, have been analyzed to determine the main transport mechanisms. This study shows that the temperature dependence of the resistivity (conductivity) may be accounted for by a variable range hopping (VRH) transport into an impurity band. Depending on the concentration of the implanted impurities and the post-implantation annealing treatment, this VRH mechanism persists over different temperature ranges that may extend up to room temperature. In this framework, two different transport regimes are identified, having the characteristic of an isotropic 3D VRH and an anisotropic nearly 2D VRH. The latter conduction mechanism appears to take place in a rather thick layer (about 400 nm) that is too large to induce a confinement …
IOP Publishing
Publication date: 
1 Jan 2017

Antonella Parisini, Andrea Parisini, Roberta Nipoti

Biblio References: 
Volume: 29 Issue: 3 Pages: 035703
Journal of Physics: Condensed Matter