Micro-Opto-Mechanical devices for various applications are fabricated by mounting micromachined structures, obtained from bulk silicon wafers by Deep...
MOEMS and Multifunctional Systems
Polycrystalline silicon nanowires fabricated with top-down technology are utilized as thermoelements in MEMS devices used for micro energy conversion or thermoelectric...
Silicon-On-Insulator (SOI) wafers with device layer thickness in the range 2-25 µm are employed for the fabrication of physical sensors for strain, pressure and temperature. The...