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In this paper, a site-selective catalytic chemical vapor deposition synthesis of carbon nanotubes on silicon-based substrates has been developed in order to get horizontally oriented nanotubes for field effect transistors and other electronic devices. Properly micro-fabricated silicon oxide and polysilicon structures have been used as substrates. Iron nanoparticles have been obtained both from a thin Fe film evaporated by e-gun and from iron nitrate solutions accurately dispersed on the substrates. Single-walled nanotubes with diameters as small as 1 nm, bridging polysilicon and silicon dioxide “pillars”, have been grown. The morphology and structure of CNTs have been characterized by SEM, AFM and Raman spectroscopy.
Publication date: 
1 Mar 2007

Renato Angelucci, Rita Rizzoli, Vincenzo Vinciguerra, Maria Fortuna Bevilacqua, Sergio Guerri, Franco Corticelli, Mara Passini

Biblio References: 
Volume: 37 Issue: 1-2 Pages: 11-15
Physica E: Low-dimensional Systems and Nanostructures