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A gate oxide obtained by wet oxidation of SiC preimplanted with nitrogen has been investigated on MOS capacitors and implemented in a n-channel MOSFET technology. Different implantation fluences and energies in the ranges 1.5 X 1013-1 X 1015 cm -2 and 2.5-10 keV, respectively, were used with the aims to study the effect of the nitrogen concentration at the SiO2/SiC interface on MOSFET performance. The highest dose, which is able to amorphize a surface SiC layer, was also employed to take advantage of the faster oxidation rate of amorphous phase with respect to crystalline one. The electron interface trap density near the conduction band has been evaluated with different techniques both on MOS capacitors and MOSFET devices; a good agreement among the measured values has been attained. A strong reduction of the electron interface traps density located near the conduction band has been …
Publication date: 
25 Jul 2008

Antonella Poggi, Francesco Moscatelli, Sandro Solmi, Roberta Nipoti

Biblio References: 
Volume: 55 Issue: 8 Pages: 2021-2028
IEEE transactions on electron devices