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Type: 
Conference
Description: 
This work reports a theoretical and experimental study on lattice deformation in silicon-rib structure induced by deposition of a stoichiometric silicon-nitride (Si 3 N 4 ) layer. Simulations of stress and strain distributions in silicon rib were performed along with estimation of optical properties for structures on a silicon-on-insulator (SOI) platform; moreover, locally-accurate strain measurements were performed on the microfabricated rib structures in proximity of the nitride-to-silicon interface employing the Convergent Beam Electron Diffraction (CBED) technique. Experimental results, as well as comparison with simulations, pointed out significant induced stress values permitting to achieve electro-optical devices such as modulators and switches.
Publisher: 
IEEE
Publication date: 
12 May 2014
Authors: 

D Marini, GB Montanari, F Mancarella, M Ferri, R Balboni, G Bolognini

Biblio References: 
Pages: 1-3
Origin: 
Photonics Technologies, 2014 Fotonica AEIT Italian Conference on