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A previously developed Monte Carlo code has been extended to the X-ray microanalysis in a~ scanning! transmission electron microscope of plan sections, consisting of bilayers and triple layers. To test the validity of this method for quantification purposes, a commercially available NiOx~ x; 1! thin film, deposited on a carbon layer, has been chosen. The composition and thickness of the NiO film and the thickness of the C support layer are obtained by fitting to the three X-ray intensity ratios I~ NiK!/I~ OK!, I~ NiK!/I~ CK!, and I~ OK!/I~ CK!. Moreover, it has been investigated to what extent the resulting film composition is affected by the presence of a contaminating carbon film at the sample surface. To this end, the sample has been analyzed both in the~ recommended!“grid downward” geometry and in the upside/down~“grid upward”! situation. It is found that a carbon contaminating film of few tens of nanometers must be assumed in both cases, in addition to the C support film. Consequently, assuming the proper C/NiOx/C stack in the simulations, the Monte Carlo method yields the correct oxygen concentration and thickness of the NiOx film.
Cambridge University Press
Publication date: 
1 Apr 2009

Aldo Armigliato, Rodolfo Rosa

Biblio References: 
Volume: 15 Issue: 2 Pages: 99
Microscopy and Microanalysis