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In this work we analyzed the radiation hardness of SiC p+ n diodes after very high 1 MeV neutron fluence. The diode structure is based on a p+ emitter ion implanted in n-type epilayer with thickness equal to 5% m and donor doping ND= 3× 1015 cm-3. Before irradiation, the average leakage current density at 100 V reverse bias was of the order of 3 nA/cm2. These devices were irradiated at four different fluence values, logarithmically distributed in the range 1014-1016 (1 MeV) neutrons/cm2. After irradiation the epilayer material became more resistive, as indicated by the reduction of the forward and reverse current density at a given voltage. In particular, after a neutron fluence of 1× 1014 n/cm2 the epilayer active doping concentration decreased to 1.5× 1015 cm-3. After irradiation at 1016 n/cm2, ie the highest fluence value, the average leakage current density at 100 V reverse bias decreased to values of the order …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2007

Francesco Moscatelli, Andrea Scorzoni, Antonella Poggi, Mara Passini, Giulio Pizzocchero, Roberta Nipoti

Biblio References: 
Volume: 556 Pages: 917-920
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