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An n-type 8 off-axis< 0001> 4H-SiC epitaxial wafer was processed. The n-type epilayer had doping and thickness of, respectively,~ 3× 1015 cm-3 and~ 5 μm. p+/n diodes with not terminated junctions were constructed by a selective area implantation process of 9.2× 1014 cm-2 Al+ ions at 400 C. The diodes had areas in the range 2× 10-4-1× 10-3 cm2. The Al depth profile was 6× 1019 cm-3 high and 164 nm thick. The post implantation annealing process was done in a high purity Ar ambient at 1600 C for 30 min. The diode current-voltage characteristics were measured in the temperature range 25-290 C. Statistics of 50-100 measurements per device type were done. The fraction of diodes that could be modeled as abrupt junctions within the frame of the Shockley theory decreased with increasing area value, but was always> 75%. The ideality factor was> 2 only at temperatures> 200 C and bias values< 1 V. The …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2006

Roberta Nipoti, Fabio Bergamini, Francesco Moscatelli, Antonella Poggi, Mariaconcetta Canino, Giuseppe Bertuccio

Biblio References: 
Volume: 527 Pages: 815-818
Materials science forum