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Type: 
Conference
Description: 
This paper reports a theoretical and experimental study on induced strain in silicon-based rib structures. Simulations of induced stress and strain distribution were performed for nitride-strained silicon; moreover, locally-accurate strain measurements were performed on manufactured rib structures in proximity of the nitride-to-silicon interface employing the Convergent Beam Electron Diffraction (CBED) technique. The study resulted in good accordance between simulated and measured strain behaviors along the rib cross-section, indicating the possibility to achieve significant strain levels (e.g. higher than 2 mε for the ε zz strain tensor component).
Publisher: 
IEEE
Publication date: 
27 Aug 2014
Authors: 

D Marini, GB Montanari, F Mancarella, M Ferri, R Balboni, G Bolognini

Biblio References: 
Pages: 195-196
Origin: 
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on