Estimation of Activation and Compensation Ratios in Al+ Ion Implanted 4H-SiC: Comparison of Two Methodologies | Bologna UNIT

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Estimation of Activation and Compensation Ratios in Al+ Ion Implanted 4H-SiC: Comparison of Two Methodologies

Type:

Journal

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

30 Jun 2022

Authors:

Roberta Nipoti, Virginia Boldrini, Mariaconcetta Canino, Fabrizio Tamarri, Salvatore Vantaggio, Antonella Parisini

Biblio References:

Volume: 1062 Pages: 241-245

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…