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Type: 
Journal
Description: 
Publisher: 
Pergamon
Publication date: 
1 Sep 2023
Authors: 

Alessandro Tonon, Enrico Di Russo, Francesco Sgarbossa, Luca Bacci, Nicola Argiolas, Carlo Scian, Yurii P Ivanov, Giorgio Divitini, Brendan Sheehan, Davide De Salvador, Andrea Gasparotto, Vittorio Morandi, Ray Duffy, Enrico Napolitani

Biblio References: 
Volume: 164 Pages: 107616
Origin: 
Materials Science in Semiconductor Processing