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MOMS fiber-optic transducers

 

Micro-Opto-Mechanical devices for various applications are fabricated by mounting micromachined structures, obtained from bulk silicon wafers by Deep...

MEMS devices for thermoelectric micro-energy harvesting based on top-down semiconductor nanowires

 

Polycrystalline silicon nanowires fabricated with top-down technology are utilized as thermoelements in MEMS devices used for micro energy conversion or thermoelectric...

MEMS sensors fabricated by micromachining of Silicon-On-Insulator substrates.

Silicon-On-Insulator (SOI) wafers with device layer thickness in the range 2-25 µm are employed for the fabrication of physical sensors for strain, pressure and temperature. The...