The total area of the clean room is 500m2, including laboratories and service corridors. Half of the area is class 100000 rated , whereas the remaining has a class 100 rating (i.e. less than 100 particles larger than 0.5 microns for cubic foot of air).
Air is recirculated approximately 20-30 times per hour, depending on room class and cooling. Class 100 area is characterized by a constant laminar air flow from ceiling to floor. Air which enters the clean room is continuously filtered to remove dirt and dust particles. This is achieved by a system featuring both pre, bag and HEPA (high-efficiency particulate air ) filters. The efficiency of the filtering system is automatically monitored to ensure constant performance over time. The clean room is positively pressurized with respect to the adjacent areas, to prevent accidental introduction of contaminants through possible leaks.
Air temperature is stable within 1 °C and its relative humidity is maintained at (40 +/- 2)%, which usually requires controlled addition of moisture to balance the natural drying effect due to air coling systems.
Rooms views:
Main Entrance & Corridor
Photolitography room
Metallization room
Furnace room
CVD & EBL room
PECVD room
