Scanning Electron Microscope (SEM) Features
•    GEMINI I column type
•    Max. resolution ≈ 1 nm @ 15 kV
•    Accelerating voltage: from 20 V to 30 kV
•    Current range from 5 pA to 20 nA
•    Magnification range from 12x to 2.000.000x
•    Variable Pressure mode up to 70 Pa

Gas Injection System (GIS) Features
•    5 channels GIS
•    Charge Compensator
•    Deposition of: Pt, SiO2, C
•    Etching of: Si, SiO2
 

Electron Beam Lithography (EBL) Features
•    RAITH ELPY Quantum system
•    NanoSuite 6.0
•    Up to 4’ wafer sample dimension
 

Focused Ion Beam (FIB) Features
•    Max. resolution ≈ 3 nm @ 15 kV
•    Accelerating voltage: from 0,5 kV a 30 kV
•    Current range from 1 pA to 100 nA
•    Magnification range from 300x to 500.000x
•    Max. view field 580 μm x 580 μm