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We report investigations on the fabrication and electrical characterization in the range 27 C-290 C of normally off 4H-SiC circular MOSFET devices manufactured on p-type semiconductor. An high quality SiO2/SiC interface is obtained by nitrogen ion implantation conducted before the thermal oxidation of SiC. Two samples with different nitrogen concentration at the SiO2/SiC interface and one un-implanted have been manufactured. The sample with the highest N concentration at the interface presents the highest channel mobility and the lowest threshold voltage. With increasing temperature, in all the samples the threshold voltage decreases and the electron channel mobility increases, reaching the maximum value of about 40 cm2/Vs at 290 C for the sample with the highest N concentration. The observed improvement of the mobility is related to the beneficial effect of the N presence at the SiO2/SiC interface, which …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2009

Francesco Moscatelli, Roberta Nipoti, Sandro Solmi, Stefano Cristiani, Michele Sanmartin, Antonella Poggi

Biblio References: 
Volume: 600 Pages: 699-702
Materials Science Forum