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Surname: 
Belsito
Firstname: 
Luca
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Researcher
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051639 9121
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RESEARCH EXPERIENCE:

Luca Belsito received a M.Sc. degree (cum laude) in Electrical Engineering in 2007 from the University of Reggio Calabria and a Ph.D. degree in Information Technology in 2011 from Bologna University. In 2011 he joined the Institute of Microelectronics and Microsystems (IMM) of the Italian National Research Council (CNR) as a scientific researcher. His research interests include design, fabrication and characterization of micro-electro-mechanical systems (MEMS) sensors and development of readout electronics. He is involved in several National and European projects and is author and co-author of tens of publications, manly focalized on the development of innovative physical sensors. From 2008 up to 2011, he worked at the design, fabrication and characterization of miniaturized opto-acoustic probes for endoscopic virtual biopsy based on ultrasound scattering by biological tissues. Since 2013 up to 2016, he was work package leader in the FP7 project ROBO-SPECT (http://www.robo-spect.eu) for the development of innovative techniques and fabrication of MOMS devices for width and depth measurements of cracks by an autonomous robotic system for tunnel structural inspection. Since 2015 he has also been work package leader in the H2020 project AEROBI (http://www.aerobi.eu) and research unit scientific coordinator in the national project NANOMEMS-X (POR-FESR 2014-2020, Emilia Romagna) for the development of high resolution strain sensors based on MEMS resonators. In 2016 he has been awarded for the best oral contribution at the 2016 E-MRS Spring Meeting, Materials and systems for micro-energy harvesting and storage symposium. Since 2018 he is also research unit scientific coordinator in the H2020 project RESIST (http://www.resistproject.eu).

 

SCIENTIFIC RESPONSIBILITIES IN COOPERATIVE RESEARCH PROJECTS:

1.            Project: ROBOSPECT “ROBOtic System with Intelligent Vision and Control for Tunnel Structural InSPECTion and Evaluation”, FP7-ICT-2013-10, Grant agreement no: 611145. Role: Work package leader.

2.            Project: NANOMEMS-X “NANO composites and MEMS based Integrated Circuits Sensor”, POR-FESR 2014-2020 (Emilia Romagna).   Role: Research unit scientific coordinator.

3.            Project: AEROBI “AErial RObotic System for In-Depth Bridge Inspection by Contact”, H2020-ICT-2015 (IA), Grant agreement no: 687384. Role: Work package leader.

4.            Project: RESIST: “RESilient transport InfraSTructure to extreme events”, H2020-MG-2016-2017 (Not yet started). Role: Research unit scientific coordinator.

 

PARTICIPATION IN OTHER INTERNATIONAL RESEARCH PROJECTS:

1.            Project: UNDERGROUND M3 “Micro-Measurement and Monitoring System for Ageing Underground Infrastructures”, Eurocores S3T programme (European Science Foundation) (ref. CRP Number 05-S3T-FP021).

2.            Project: SINERGY: “Silicon Friendly Materials and Device Solutions for Microenergy Applications”, FP7-NMP.2013.2.2-4, Grant agreement no: 604169.

2.            Project: Q-SORT, (H2020-FETOPEN-1-2016-2017). Grant agreement no: 766970.

3.           Project: SiC NANO FOR PiCOGEO: “SiC optical nano-strain-meters for pico-detection in Geosciences”. H2020-FETOPEN-2018-2019-2020-01, Grant agreement no: 863220.

 

AWARDS:

Best oral contribution a Materials and systems for micro-energy harvesting and storage symposium:

L. Belsito, F. Mancarella, A. Roncaglia, “Top-down fabrication of high density nanowire arrays for application in thermoelectric micro-energy conversion devices”, 2016 E-MRS Spring Meeting, 2-6 May 2016, Lille, (France).

 

INVITED INTERNATIONAL CONFERENCE TALKS:

[1]          L. Belsito, F. Mancarella, A. Roncaglia, A. Tarancon, A. Morata, G. Gadea, J. D. Santos, C. Calaza, M. Salleras, I. Donmez, L. Fonseca, “Micro thermoelectric generators based on silicon nanowires fabricated by top-down and bottom-up technologies”, EMN Meeting on Thermoelectric Materials, 21-25 February, 2016, Orlando, Florida, USA.

[2]          L. Belsito, F. Mancarella, A. Roncaglia, E. Vannacci , E. Biagi, “Fiber-optic ultrasonic probes based on Micro-Opto-Mechanical technology for applications in biological tissue analysis and acoustic microscopy”, 2016 EMN Beijing Meeting, 21-25 April 2016, Beijing, China.

[3]          L. Belsito, F. Mancarella, A. Roncaglia, E. Vannacci , E. Biagi, “Fabrication of highly miniaturized acousto-optical ultrasound devices for endoscopic use in medical applications”, Ultrasonics 2016, 6-8 June 2016, Caparica, Portugal.

Scientific Production

Sergio Sapienza, Matteo Ferri, Luca Belsito, Diego Marini, Marcin Zielinski, Francesco La Via, Alberto Roncaglia

Correlation between Q-Factor and Residual Stress in Epitaxial 3C-SiC Double-Clamped Beam Resonators

Materials Science Forum [Trans Tech Publications Ltd], Volume: 1089 Pages: 57-61

AH Tavabi, P Rosi, A Roncaglia, E Rotunno, M Beleggia, PH Lu, L Belsito, G Pozzi, S Frabboni, P Tiemeijer, RE Borkowski, V Grillo

Generation of electron vortex beams with over 1000 orbital angular momentum quanta using a tuneable electrostatic spiral phase plate

arXiv preprint arXiv:2203.00477 [],

AH Tavabi, P Rosi, RBG Ravelli, A Gijsbers, E Rotunno, T Guner, Y Zhang, A Rocaglia, L Belsito, G Pozzi, D Tibeau, G Gazzadi, M Ghosh, S Frabboni, PJ Peters, E Karimi, P Tiemeijer, RE Dunin-Borkowski, V Grillo

Symmetry and planar chirality of a protein measured on an angular basis in a transmission electron microscope

arXiv preprint arXiv:2110.03391 [],

Sergio Sapienza, Matteo Ferri, Luca Belsito, Diego Marini, Marcin Zielinski, Francesco La Via, Alberto Roncaglia

Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on< 111> and< 100> Silicon

Micromachines [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 9 Pages: 1072

Amir H Tavabi, Paolo Rosi, Enzo Rotunno, Alberto Roncaglia, Luca Belsito, Stefano Frabboni, Giulio Pozzi, Gian Carlo Gazzadi, Peng-Han Lu, Robert Nijland, Moumita Ghosh, Peter Tiemeijer, Ebrahim Karimi, Rafal E Dunin-Borkowski, Vincenzo Grillo

Experimental Demonstration of an Electrostatic Orbital Angular Momentum Sorter for Electron Beams

Physical Review Letters [American Physical Society], Volume: 126 Issue: 9 Pages: 094802

Luca Belsito, Matteo Bosi, Fulvio Mancarella, Matteo Ferri, Alberto Roncaglia

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

Journal of Microelectromechanical Systems [IEEE], Volume: 29 Issue: 1 Pages: 117-128

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito

Design and Fabrication of Very Small MEMS Microphone with Silicon Diaphragm Supported by Z-shape Arms using SOI Wafer

Solid-State Electronics [Pergamon], Volume: 148 Pages: 27-34

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Microsystem Technologies [Springer-Verlag], Volume: 24 Issue: 7 Pages: 3133-3140

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Issue: 7 Pages: 3133-3140

Konstantinos Loupos, Anastasios D Doulamis, Christos Stentoumis, Eftychios Protopapadakis, Konstantinos Makantasis, Nikolaos D Doulamis, Angelos Amditis, Philippe Chrobocinski, Juan Victores, Roberto Montero, Elisabeth Menendez, Carlos Balaguer, Rafa Lopez, Miquel Cantero, Roman Navarro, Alberto Roncaglia, Luca Belsito, Stephanos Camarinopoulos, Nikolaos Komodakis, Praveer Singh

Autonomous robotic system for tunnel structural inspection and assessment

International Journal of Intelligent Robotics and Applications [Springer Singapore], Volume: 2 Issue: 1 Pages: 43-66

Konstantinos Loupos, Anastasios D Doulamis, Christos Stentoumis, Eftychios Protopapadakis, Konstantinos Makantasis, Nikolaos D Doulamis, Angelos Amditis, Philippe Chrobocinski, Juan Victores, Roberto Montero, Elisabeth Menendez, Carlos Balaguer, Rafa Lopez, Miquel Cantero, Roman Navarro, Alberto Roncaglia, Luca Belsito, Stephanos Camarinopoulos, Nikolaos Komodakis, Praveer Singh

Autonomous robotic system for tunnel structural inspection and assessment

International Journal of Intelligent Robotics and Applications [Springer Singapore], Volume: 2 Issue: 1 Pages: 43-66

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito, Reza Ansari

Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer

Journal of Micro/Nanolithography, MEMS, and MOEMS [International Society for Optics and Photonics], Volume: 17 Issue: 1 Pages: 015002

Dario Narducci, Luca Belsito, Alex Morata

Silicon for Thermoelectric Energy Harvesting Applications

Thermoelectric Energy Conversion: Basic Concepts and Device Applications [John Wiley & Sons],

E Vannacci, S Granchi, L Belsito, A Roncaglia, E Biagi

Wide bandwidth fiber-optic ultrasound probe in MOMS technology: Preliminary signal processing results

Ultrasonics [Elsevier], Volume: 75 Pages: 164-173

Luca Belsito, Fulvio Mancarella, Alberto Roncaglia

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 26 Issue: 9 Pages: 095018

Luis Fonseca, Jose-Domingo Santos, Alberto Roncaglia, Dario Narducci, Carlos Calaza, Marc Salleras, Inci Donmez, Albert Tarancon, Alex Morata, Gerard Gadea, Luca Belsito, Laura Zulian

Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Semiconductor Science and Technology [IOP Publishing], Volume: 31 Issue: 8 Pages: 084001

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Luca Masini, Jize Yan, Ashwin A Seshia, Kenichi Soga, Alberto Roncaglia

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Sensors and Actuators A: Physical [Elsevier], Volume: 239 Pages: 90-101

A Parisini, M Gorni, A Nath, L Belsito, Mulpuri V Rao, R Nipoti

Remarks on the room temperature impurity band conduction in heavily Al+ implanted 4H-SiC

Journal of Applied Physics [AIP Publishing LLC], Volume: 118 Issue: 3 Pages: 035101

F Suriano, M Ferri, F Moscatelli, F Mancarella, L Belsito, S Solmi, A Roncaglia, Stefano Frabboni, Gian Carlo Gazzadi, D Narducci

Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires

Journal of Electronic Materials [Springer US], Volume: 44 Issue: 1 Pages: 371-376

L Belsito, E Vannacci, F Mancarella, M Ferri, GP Veronese, E Biagi, A Roncaglia

Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 24 Issue: 8 Pages: 085003

E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, E Biagi

Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology

Biomedical microdevices [Springer US], Volume: 16 Issue: 3 Pages: 415-426

Dario Narducci, Gianfranco Cerofolini, Matteo Ferri, Francesco Suriano, Fulvio Mancarella, Luca Belsito, Sandro Solmi, Alberto Roncaglia

Phonon scattering enhancement in silicon nanolayers

Journal of materials science [Springer US], Volume: 48 Issue: 7 Pages: 2779-2784

F Suriano, M Ferri, S Solmi, L Belsito, A Roncaglia, E Romano, D Narducci, G Cerofolini

Thermoelectric properties of p and n-type nanocrystalline silicon nanowires with high doping levels

MRS Online Proceedings Library [Springer International Publishing], Volume: 1408 Issue: 1 Pages: 67-72

A Poggi, F Moscatelli, S Solmi, A Armigliato, L Belsito, R Nipoti

Effect of nitrogen implantation at the SiO 2/SiC interface on the electron mobility and free carrier density in 4 H-SiC metal oxide semiconductor field effect transistor channel

Journal of Applied Physics [American Institute of Physics], Volume: 107 Issue: 4 Pages: 044506

Matteo Ferri, F Mancarell, Luca Belsito, Alberto Roncaglia, Jize Yan, Ashwin A Seshia, Kenichi Soga, J Zalesky

Strain sensing on steel surfaces using vacuum packaged MEMS resonators

Procedia Engineering [Elsevier], Volume: 5 Pages: 1426-1429

Massimiliano Ruggeri, Luca Belsito, Federico Bosi, Paolo Cominetti, Matteo Ferri, Mattia Ferri, Alberto Roncaglia

Advancements in Noninvasive Pressure Sensing in Hydraulic Components

Fluid Power Systems Technology [American Society of Mechanical Engineers], Volume: 87431 Pages: V001T01A001

Francesco La Via, Luca Belsito, Ferri Matteo, Sergio Sapienza, Alberto Roncaglia, Marcin Zielinski, Viviana Scuderi

Residual Stress Measurement by Raman on Surface-Micromachined Monocrystalline 3C-SiC on Silicon on insulator

Materials Science Forum [Trans Tech Publications Ltd], Volume: 1062 Pages: 320-324

Luca Belsito, Luca Masini, Alberto Roncaglia

Sensitivity Enhancement in Vacuum Packaged Resonant MEMS Strain Sensors with On-Chip Strain Amplification Mechanism

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) [IEEE], Pages: 1215-1218

Luca Belsito, Matteo Ferri, Luca Masini, Alberto Roncaglia

Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) [IEEE], Pages: 1331-1334

Kostas Bouklas, Angelos Amditis, Rafael Weilharter, Visvanathan Ramesh, Miguel Ángel Trujillo Soto, Guillermo Heredia, Luca Belsito, Stephanos Camarinopoulos, Friedrich Fraundorfer

Increasing the Resilience of European Transport Infrastructure

International Workshop on Civil Structural Health Monitoring [Springer, Cham], Pages: 761-774

Diego Marini, Luca Belsito, Luca Masini, Miguel A Trujillo, Ángel L Petrus, Daniel Martinez, Francisco Gamero, José M Barrientos, Elena Blanco, Alberto Roncaglia

Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) [IEEE], Pages: 893-896

Luca Belsito, Matteo Ferri, Alberto Roncaglia

Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) [IEEE], Pages: 2009-2012

Marco Crescentini, Cinzia Tamburini, Luca Belsito, Aldo Romani, Alberto Roncaglia, Marco Tartagni

Ultra-Low Power CMOS Readout for Resonant MEMS Strain Sensors

Multidisciplinary Digital Publishing Institute Proceedings [], Volume: 2 Issue: 13 Pages: 973

Diego Marini, Luca Belsito, Fulvio Mancarella, Filippo Bonafè, Alberto Roncaglia

Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete

2017 IEEE SENSORS [IEEE], Pages: 1-3

Massimiliano Ruggeri, Giorgio Paolo Massarotti, Luca Belsito, Alberto Roncaglia

Indirect Pressure Measurement on Hydraulic Components Through New MEMS Strain Sensors

ASME/BATH 2017 Symposium on Fluid Power and Motion Control [American Society of Mechanical Engineers Digital Collection],

Alberto Roncaglia, Ruggero Anzalone, Luca Belsito, Fulvio Mancarella, Massimo Camarda, Nicolo’ Piluso, Roberta Nipoti, Francesco La Via

Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor

Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 902-905

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, Kenichi Soga

High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) [IEEE], Pages: 992-995

Matteo Bosi, Giovanni Attolini, Bernard Enrico Watts, Alberto Roncaglia, Antonella Poggi, Fulvio Mancarella, Francesco Moscatelli, Luca Belsito, Matteo Ferri

Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 897-900

L Belsito, F Mancarella, M Ferri, A Roncaglia, E Biagi, S Cerbai, L Masotti, G Masetti, N Speciale

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 594-597

Matteo Ferri, Luca Belsito, Fulvio Mancarella, Luca Masini, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, J Zalesky, K Soga

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1056-1059

E Biagi, S Cerbai, L Masotti, L Belsito, A Roncaglia, G Masetti, N Speciale

MOMS technology for fully fiber optic ultrasonic probes: A proposal for virtual biopsy

SENSORS, 2010 IEEE [IEEE], Pages: 1156-1160

Francesco Moscatelli, Antonella Poggi, Sandro Solmi, Roberta Nipoti, Aldo Armigliato, Luca Belsito

Nitridation of the SiO2/SiC interface by N+ implantation: Hall versus field effect mobility in n-channel planar 4H-SiC MOSFETs

Materials Science Forum [Trans Tech Publications Ltd], Volume: 645 Pages: 491-494

Elena Biagi, Stefano Cerbai, Leonardo Masotti, Luca Belsito, Alberto Roncaglia, Guido Masetti, Nicolò Speciale

Fiber optic broadband ultrasonic probe for virtual biopsy: Technological solutions

2009 IEEE International Ultrasonics Symposium [IEEE], Pages: 200-203

Enrico Cozzani, Caterina Summonte, Luca Belsito, Gian Carlo Cardinali, Alberto Roncaglia

Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range

SENSORS, 2007 IEEE [IEEE], Pages: 181-184

L Belsito, L Masini, M Sanmartin, K Loupos, A Roncaglia

Ultrasonic sensor system for automatic depth measurement of surface opening cracks in concrete by means of a robotic arm

Transforming the Future of Infrastructure through Smarter Information: Proceedings of the International Conference on Smart Infrastructure and ConstructionConstruction, 27–29 June 2016 [ICE Publishing], Pages: 239-244

L Belsito, L Masini, M Sanmartin, K Loupos, A Roncaglia

Ultrasonic sensor system for automatic depth measurement of surface opening cracks in concrete by means of a robotic arm

Transforming the Future of Infrastructure through Smarter Information: Proceedings of the International Conference on Smart Infrastructure and ConstructionConstruction, 27–29 June 2016 [ICE Publishing], Pages: 239-244

L Fonseca, C Calaza, M Salleras, I Donmez, J Santos, G Gadea, A Morata, A Tarancon, A Roncaglia, L Belsito, D Narducci, L Zulian

Smart integration of Si NWs arrays in all-silicon thermoelectric micronanogenerators

Smart Systems Integration 2016-International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 [Verlag Wissenschaftliche Scripten], Pages: 384-387

Enrico Vannacci, Simona Granchi, Elena Biagi, Luca Belsito, Alberto Roncaglia

High Resolution Ultrasonic Images by Miniaturized Fiber-Optic Probe

Sensors [Springer, Cham], Pages: 349-353

M Ferri, F Suriano, F Mancarella, L Belsito, S Solmi, A Roncaglia, D Narducci, G Cerofolini

Fabrication and Thermoelectric Characterization of Surface-Micromachined Silicon Nanowires

2012 E-MRS Spring Meeting-Book of Abstracts [FR],

E Biagi, S Cerbai, L Masotti, L Belsito, A Roncaglia, G Masetti, N Speciale

Fiber optic broadband ultrasonic probe for virtual biopsy: Technological solutions

Sensors and Microsystems [Springer, Dordrecht], Pages: 223-227

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