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Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars
Materials & Design [Elsevier], Pages: 109833
Design and Characterization of a Silicon W-Band Woodpile Photonic Crystal Waveguide
IEEE Microwave and Wireless Components Letters [IEEE], Volume: 30 Issue: 4 Pages: 347-350
Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators
Journal of Microelectromechanical Systems [IEEE], Volume: 29 Issue: 1 Pages: 117-128
Journal of Crystal Growth [North-Holland], Volume: 507 Pages: 70-76
3C-SiC Growth on Inverted Silicon Pyramids Patterned Substrate
Materials [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 20 Pages: 3407
Journal of Crystal Growth [North-Holland],
Materials Science Forum [], Volume: 924 Pages: 913
Integration of InGaP/GaAs/Ge triple‐junction solar cells on deeply patterned silicon substrates
Progress in Photovoltaics: Research and Applications [], Volume: 24 Issue: 10 Pages: 1368-1377
Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 26 Issue: 9 Pages: 095018
Processing-Induced Electrically Active Defects in Black Silicon Nanowire Devices
ACS applied materials & interfaces [American Chemical Society], Volume: 8 Issue: 16 Pages: 10443-10450
Chemosphere [Pergamon], Volume: 149 Pages: 211-218
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
Sensors and Actuators A: Physical [Elsevier], Volume: 239 Pages: 90-101
Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires
Journal of Electronic Materials [Springer US], Volume: 44 Issue: 1 Pages: 371-376
Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates
ECS Transactions [IOP Publishing], Volume: 64 Issue: 6 Pages: 631
ECS Transactions [The Electrochemical Society], Volume: 64 Issue: 6 Pages: 631-648
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology
Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 24 Issue: 8 Pages: 085003
Biomedical microdevices [Springer US], Volume: 16 Issue: 3 Pages: 415-426
Macromolecular rapid communications [], Volume: 35 Issue: 3 Pages: 355-359
Strain relaxation of GaAs/Ge crystals on patterned Si substrates
Applied Physics Letters [American Institute of Physics], Volume: 104 Issue: 2 Pages: 022112
Strain relaxation of GaAs/Ge crystals on patterned Si substrates
Applied Physics Letters [], Volume: 104 Issue: 2
Identification and tackling of a parasitic surface compound in SiC and Si-rich carbide films
Materials Science and Engineering: B [Elsevier], Volume: 178 Issue: 9 Pages: 623-629
Phonon scattering enhancement in silicon nanolayers
Journal of materials science [Springer US], Volume: 48 Issue: 7 Pages: 2779-2784
High quality surface micromachining of LiNbO3 by ion implantation-assisted etching
Proc. of SPIE Vol [], Volume: 8612 Pages: 86120E-1
A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications
Proceedings NSTI-Nanotech [], Pages: 172-175
Carbon-cap for ohmic contacts on ion-implanted 4H–SiC
Electrochemical and Solid State Letters [IOP Publishing], Volume: 13 Issue: 12 Pages: H432
Strain sensing on steel surfaces using vacuum packaged MEMS resonators
Procedia Engineering [Elsevier], Volume: 5 Pages: 1426-1429
Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures
Smart Structures and Systems [], Volume: 6 Issue: 3 Pages: 225-238
Micromachined gas calibration sources based on nanometric depth microchannels
Procedia Engineering [Elsevier], Volume: 5 Pages: 1344-1347
Growth and characterization of 3C-SiC films for micro electro mechanical systems (MEMS) applications
Crystal growth & design [American Chemical Society], Volume: 9 Issue: 11 Pages: 4852-4859
Strain Evaluation in SiC MEMS Test Structures
ECS Transactions [IOP Publishing], Volume: 25 Issue: 8 Pages: 1031
Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures
Smart Struct. Syst [], Volume: 6 Pages: 225-238
Sensors and Actuators B: Chemical [Elsevier], Volume: 141 Issue: 1 Pages: 322-328
Sensors and Actuators B: Chemical [Elsevier], Volume: 135 Issue: 1 Pages: 342-351
PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS
Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006 [World Scientific], Pages: 267
CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5μm atmospheric window
Sensors and Actuators B: Chemical [Elsevier], Volume: 125 Issue: 1 Pages: 214-223
A measurement technique for thermoelectric power of CMOS layers at the wafer level
Sensors and Actuators A: Physical [Elsevier], Volume: 132 Issue: 1 Pages: 289-295
FOR DIELECTRIC MEMBRANES USINGTMAH'
Sensors And Microsystems-Proceedings Of The 9th Italian Conference [World Scientific], Pages: 373
Mechanism Governing Surface Roughening of Al Ion Implanted 4H-SiC during Annealing under a C-Cap
Materials Science Forum [Trans Tech Publications Ltd], Volume: 1062 Pages: 235-240
2019 PhotonIcs & Electromagnetics Research Symposium-Spring (PIERS-Spring) [IEEE], Pages: 223-228
Materials Science Forum [Trans Tech Publications Ltd], Volume: 924 Pages: 913-918
Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete
2017 IEEE SENSORS [IEEE], Pages: 1-3
Stacking Fault Analysis of Epitaxial 3C-SiC on Si (001) Ridges
Materials Science Forum [Trans Tech Publications Ltd], Volume: 858 Pages: 147-150
3C-SiC Epitaxy on Deeply Patterned Si (111) Substrates
Materials Science Forum [Trans Tech Publications Ltd], Volume: 858 Pages: 151-154
Induced strain in silicon waveguides and couplers
Silicon Photonics X [International Society for Optics and Photonics], Volume: 9367 Pages: 93671L
Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor
Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 902-905
Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC
Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 620-623
Defect Reduction in Epitaxial 3C-SiC on Si (001) and Si (111) by Deep Substrate Patterning
Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 193-196
Study of induced strain in silicon rib structures
11th International Conference on Group IV Photonics (GFP) [IEEE], Pages: 195-196
2014 20th International Conference on Ion Implantation Technology (IIT) [IEEE], Pages: 1-4
Challenges and progress toward a silicon-based multi-microring optical network-on-chip
2014 European Conference on Networks and Communications (EuCNC) [IEEE], Pages: 1-5
Lattice deformations in strained-silicon rib structures for photonic devices
2014 Fotonica AEIT Italian Conference on Photonics Technologies [IEEE], Pages: 1-3
45th International Symposium of Essential Oils (ISEO 2014) [], Volume: 1 Pages: 37-37
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) [IEEE], Pages: 992-995
High quality surface micromachining of LiNbO3 by ion implantation-assisted etching
Micromachining and Microfabrication Process Technology XVIII [International Society for Optics and Photonics], Volume: 8612 Pages: 86120E
High dose Al+ implanted and microwave annealed 4H-SiC
Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 817-820
Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si
Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 897-900
Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1056-1059
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 594-597
Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Materials Science Forum [Trans Tech Publications Ltd], Volume: 679 Pages: 504-507
β-SiC NWs grown on patterned and MEMS silicon substrates
Materials Science Forum [Trans Tech Publications Ltd], Volume: 679 Pages: 508-511
Residual stress measurement and simulation of 3C-SiC single and poly crystal cantilevers
Materials Science Forum [Trans Tech Publications Ltd], Volume: 645 Pages: 865-868
Design and prototyping of a MEMS-based crackmeter for structural monitoring
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 315-318
SENSORS, 2008 IEEE [IEEE], Pages: 1131-1134
2008 15th IEEE International Conference on Electronics, Circuits and Systems [IEEE], Pages: 89-92
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 615-618
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1661-1664
Wafer-level measurement of thermal conductivity on thin films
SENSORS, 2006 IEEE [IEEE], Pages: 1239-1242
SENSORS, 2006 IEEE [IEEE], Pages: 1235-1238
Fabrication of Pt-polysilicon thin-film thermopiles: A preliminary study
SENSORS, 2005 IEEE [IEEE], Pages: 1141-1144
Wafer-level testing of thermopile IR detectors
SENSORS, 2005 IEEE [IEEE], Pages: 4 pp.
Abstract book-International conference on quantum dots 2014 [],
Fabrication and Thermoelectric Characterization of Surface-Micromachined Silicon Nanowires
2012 E-MRS Spring Meeting-Book of Abstracts [FR],
PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS APPLICATIONS
Sensors And Microsystems [], Pages: 267-271
HIGHLY SENSITIVE THERMOELECTRIC TRANSDUCERS WITH CMOS MATERIALS
Sensors And Microsystems [], Pages: 573-577
WAFER-LEVEL MEASUREMENT OF THIN FILMS THERMOELECTRIC POWER
Sensors And Microsystems [], Pages: 578-583
A COMPUTATIONALLY EFFICIENT MODEL FOR THERMAL SENSORS SIMULATION
Sensors And Microsystems [], Pages: 152-156
AN OPTIMIZED FRONT-SIDE MICROMACHINING PROCESS FOR DIELECTRIC MEMBRANES USING TMAH
Sensors And Microsystems [], Pages: 374-378