Primary tabs
Alberto Roncaglia received a M. Sc. Degree in Electrical Engineering and a Ph. D. degree in Electronics and Computer Science in 1998 and 2002, respectively, both from Bologna University. In 2001 he joined the Institute of Microelectronics and Microsystems (IMM) of the Italian National Research Council (CNR) as a permanent staff member. His research activity is mainly focused on technology development for Micro- and Nano-Electro-Mechanical and Opto-Mechanical Systems (MEMS, NEMS and MOMS), with particular concern about manufacturing techniques but also including design, simulation and readout electronics issues. His research experience within international collaborative projects dates back to the period 2002-2005, when he worked on the development of CMOS-compatible thermoelectric infrared microsensors within FP5 Netgas project (http://cordis.europa.eu/project/rcn/63973_en.html), focused on an innovative technology for manufacturing photoacoustic gas-sensing systems. Since October 2006 until June 2009, he worked on the design and fabrication of MEMS resonant strain sensors in the framework of the Eurocores “Underground M3” project (S3T ESF programme) as a Principal Investigator. Since November 2013, he has been coordinating the research activity of IMM Institute within the two FP7 projects ROBO-SPECT (http://www.robo-spect.eu) and SiNERGY (http://www.sinergy-project.eu), focused on different applications of silicon-based MOMS/NEMS devices. Since December 2015, he has been working as a research unit coordinator within the H2020 AEROBI project (http://www.aerobi.eu). In the last years, he has also worked as a project coordinator in applied research projects funded within national and regional programmes for industrial research (Industria 2015, POR-FESR Emilia Romagna).
Scientific Production
Increasing the resolution of transmission electron microscopy by computational ghost imaging
arXiv preprint arXiv:2401.01898 [],
Correlation between Q-Factor and Residual Stress in Epitaxial 3C-SiC Double-Clamped Beam Resonators
Materials Science Forum [Trans Tech Publications Ltd], Volume: 1089 Pages: 57-61
arXiv preprint arXiv:2203.00477 [],
Micromachines [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 9 Pages: 1072
Experimental Demonstration of an Electrostatic Orbital Angular Momentum Sorter for Electron Beams
Physical Review Letters [American Physical Society], Volume: 126 Issue: 9 Pages: 094802
Near-4D STEM with an Orbital Angular Momentum Sorter: Advantages and Challenges
Microscopy and Microanalysis [Cambridge University Press], Volume: 26 Issue: S2 Pages: 236-238
Microscopy and Microanalysis [Cambridge University Press], Volume: 26 Issue: S2 Pages: 1538-1539
Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators
Journal of Microelectromechanical Systems [IEEE], Volume: 29 Issue: 1 Pages: 117-128
Experimental demonstration of an electrostatic orbital angular momentum sorter for electrons
arXiv preprint arXiv:1910.03706 [],
Solid-State Electronics [Pergamon], Volume: 148 Pages: 27-34
Design and fabrication of high performance condenser microphone using C-slotted diaphragm
Microsystem Technologies [Springer-Verlag], Volume: 24 Issue: 7 Pages: 3133-3140
Design and fabrication of high performance condenser microphone using C-slotted diaphragm
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Issue: 7 Pages: 3133-3140
Autonomous robotic system for tunnel structural inspection and assessment
International Journal of Intelligent Robotics and Applications [Springer Singapore], Volume: 2 Issue: 1 Pages: 43-66
Autonomous robotic system for tunnel structural inspection and assessment
International Journal of Intelligent Robotics and Applications [Springer Singapore], Volume: 2 Issue: 1 Pages: 43-66
Journal of Micro/Nanolithography, MEMS, and MOEMS [International Society for Optics and Photonics], Volume: 17 Issue: 1 Pages: 015002
Ultrasonics [Elsevier], Volume: 75 Pages: 164-173
Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 26 Issue: 9 Pages: 095018
Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
Semiconductor Science and Technology [IOP Publishing], Volume: 31 Issue: 8 Pages: 084001
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
Sensors and Actuators A: Physical [Elsevier], Volume: 239 Pages: 90-101
ICE Virtual Library essential engineering knowledge
Transport [], Volume: 169 Issue: 1
ICE Virtual Library essential engineering knowledge
Géotechnique [], Volume: 65 Issue: 8 Pages: 625-641
ICE Virtual Library essential engineering knowledge
Géotechnique [], Volume: 65 Issue: 8 Pages: 625-641
Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires
Journal of Electronic Materials [Springer US], Volume: 44 Issue: 1 Pages: 371-376
ICE Virtual Library essential engineering knowledge
Geotechnical Engineering [], Issue: 4129-4134
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology
Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 24 Issue: 8 Pages: 085003
Biomedical microdevices [Springer US], Volume: 16 Issue: 3 Pages: 415-426
Enhancement of the power factor in two‐phase silicon–boron nanocrystalline alloys
physica status solidi (a) [], Volume: 211 Issue: 6 Pages: 1255-1258
Nanograin effects on the thermoelectric properties of poly-Si nanowires
Journal of electronic materials [Springer US], Volume: 42 Issue: 7 Pages: 2393-2401
Phonon scattering enhancement in silicon nanolayers
Journal of materials science [Springer US], Volume: 48 Issue: 7 Pages: 2779-2784
Thermoelectric properties of p and n-type nanocrystalline silicon nanowires with high doping levels
MRS Online Proceedings Library [Springer International Publishing], Volume: 1408 Issue: 1 Pages: 67-72
Thermoelectric materials in MEMS and NEMS: a review
Science of Advanced Materials [American Scientific Publishers], Volume: 3 Issue: 3 Pages: 401-419
Ultradense silicon nanowire arrays produced via top-down planar technology
Microelectronic engineering [Elsevier], Volume: 88 Issue: 6 Pages: 877-881
Industrially Scalable Process for Silicon Nanowires for Seebeck Generators
arXiv preprint arXiv:1011.4700 [],
ICE Virtual Library essential engineering knowledge
Proceedings of the Institution of Civil Engineers-Municipal Engineer [], Volume: 163 Issue: 2 Pages: 77-88
Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures
Smart Structures and Systems [], Volume: 6 Issue: 3 Pages: 225-238
Strain sensing on steel surfaces using vacuum packaged MEMS resonators
Procedia Engineering [Elsevier], Volume: 5 Pages: 1426-1429
Smart Structures and Systems [Techno Press], Volume: 6 Issue: 3 Pages: 225-238
Growth and characterization of 3C-SiC films for micro electro mechanical systems (MEMS) applications
Crystal growth & design [American Chemical Society], Volume: 9 Issue: 11 Pages: 4852-4859
Strain Evaluation in SiC MEMS Test Structures
ECS Transactions [IOP Publishing], Volume: 25 Issue: 8 Pages: 1031
Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures
Smart Struct. Syst [], Volume: 6 Pages: 225-238
ICE Virtual Library essential engineering knowledge
Proceedings of the Institution of Civil Engineers [], Volume: 162 Issue: 2 Pages: 75-83
Thermofluid analysis of ultra low power hotplates for a MOX gas sensing device
IEEE Sensors Journal [IEEE], Volume: 9 Issue: 5 Pages: 504-511
Proceedings of the Institution of Civil Engineers-Civil Engineering [], Volume: 161 Issue: 5 Pages: 30-37
PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS
Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006 [World Scientific], Pages: 267
Micro-measurement and monitoring system for ageing underground infrastructure (Underground M3)
World Forum on Smart Materials and Smart Structures Technology: Proceedings of SMSST'07, World Forum on Smart Materials and Smart Structures Technology (SMSST'07), China, 22-27 May, 2007 [CRC Press], Pages: 96
CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5μm atmospheric window
Sensors and Actuators B: Chemical [Elsevier], Volume: 125 Issue: 1 Pages: 214-223
A measurement technique for thermoelectric power of CMOS layers at the wafer level
Sensors and Actuators A: Physical [Elsevier], Volume: 132 Issue: 1 Pages: 289-295
FOR DIELECTRIC MEMBRANES USINGTMAH'
Sensors And Microsystems-Proceedings Of The 9th Italian Conference [World Scientific], Pages: 373
Advancements in Noninvasive Pressure Sensing in Hydraulic Components
Fluid Power Systems Technology [American Society of Mechanical Engineers], Volume: 87431 Pages: V001T01A001
Materials Science Forum [Trans Tech Publications Ltd], Volume: 1062 Pages: 320-324
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) [IEEE], Pages: 1215-1218
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) [IEEE], Pages: 1331-1334
A compact cantilever-based photoacoustic sensor for trace-gas detection
Quantum Sensing and Nano Electronics and Photonics XVII [International Society for Optics and Photonics], Volume: 11288 Pages: 112882E
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) [IEEE], Pages: 893-896
Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) [IEEE], Pages: 2009-2012
Ultra-Low Power CMOS Readout for Resonant MEMS Strain Sensors
Multidisciplinary Digital Publishing Institute Proceedings [], Volume: 2 Issue: 13 Pages: 973
Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete
2017 IEEE SENSORS [IEEE], Pages: 1-3
Indirect Pressure Measurement on Hydraulic Components Through New MEMS Strain Sensors
ASME/BATH 2017 Symposium on Fluid Power and Motion Control [American Society of Mechanical Engineers Digital Collection],
Detection of tensile force loss in a pre-stressing strand using coil impedance measurement
International Conference on Smart Infrastructure and Construction 2016 [Cambridge Centre for Smart Infrastructure and Construction],
Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor
Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 902-905
Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC
Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 620-623
2014 IEEE International Symposium on Robotic and Sensors Environments (ROSE) Proceedings [IEEE], Pages: 72-77
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) [IEEE], Pages: 992-995
Micro-measurement and monitoring system for ageing underground infrastructure (Underground M3)
Geotechnical Aspects of Underground Construction in Soft Ground [CRC Press/Balkema], Pages: 197-204
Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si
Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 897-900
Nanograin Effects on the Thermoelectric Properties of Poly-Si Nanowiress
Book of Abstracts [], Pages: 1
Fabrication and Thermoelectric Characterization of Surface-Micromachined Silicon Nanowires
E-MRS 2012 Spring Meeting-May 14-18 [FR],
Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1056-1059
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 594-597
β-SiC NWs grown on patterned and MEMS silicon substrates
Materials Science Forum [Trans Tech Publications Ltd], Volume: 679 Pages: 508-511
MOMS technology for fully fiber optic ultrasonic probes: A proposal for virtual biopsy
SENSORS, 2010 IEEE [IEEE], Pages: 1156-1160
Residual stress measurement and simulation of 3C-SiC single and poly crystal cantilevers
Materials Science Forum [Trans Tech Publications Ltd], Volume: 645 Pages: 865-868
Fiber optic broadband ultrasonic probe for virtual biopsy: Technological solutions
2009 IEEE International Ultrasonics Symposium [IEEE], Pages: 200-203
Design and prototyping of a MEMS-based crackmeter for structural monitoring
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 315-318
SENSORS, 2008 IEEE [IEEE], Pages: 1131-1134
A packaging technique for silicon MEMS strain sensors on steel
SENSORS, 2008 IEEE [IEEE], Pages: 1524-1527
3D simulation of conjugate heat transfer of ULP hotplates for a MOX gas sensing device
SENSORS, 2007 IEEE [IEEE], Pages: 95-98
Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range
SENSORS, 2007 IEEE [IEEE], Pages: 181-184
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 615-618
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1661-1664
Wafer-level measurement of thermal conductivity on thin films
SENSORS, 2006 IEEE [IEEE], Pages: 1239-1242
SENSORS, 2006 IEEE [IEEE], Pages: 1235-1238
Wafer-level testing of thermopile IR detectors
SENSORS, 2005 IEEE [IEEE], Pages: 4 pp.
Fabrication of Pt-polysilicon thin-film thermopiles: A preliminary study
SENSORS, 2005 IEEE [IEEE], Pages: 1141-1144
Springer Handbook of Semiconductor Devices [Springer, Cham], Pages: 279-308
Crossrail Project: Infrastructure design and construction [ICE Publishing], Pages: 27-41
Smart integration of Si NWs arrays in all-silicon thermoelectric micronanogenerators
Smart Systems Integration 2016-International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 [Verlag Wissenschaftliche Scripten], Pages: 384-387
Transforming the Future of Infrastructure through Smarter Information: Proceedings of the International Conference on Smart Infrastructure and ConstructionConstruction, 27–29 June 2016 [ICE Publishing], Pages: 309-314
Transforming the Future of Infrastructure through Smarter Information: Proceedings of the International Conference on Smart Infrastructure and ConstructionConstruction, 27–29 June 2016 [ICE Publishing], Pages: 239-244
Transforming the Future of Infrastructure through Smarter Information: Proceedings of the International Conference on Smart Infrastructure and ConstructionConstruction, 27–29 June 2016 [ICE Publishing], Pages: 239-244
High Resolution Ultrasonic Images by Miniaturized Fiber-Optic Probe
Sensors [Springer, Cham], Pages: 349-353
Geotechnical Aspects of Underground Construction in Soft Ground [CRC Press], Pages: 215-222
Fiber optic broadband ultrasonic probe for virtual biopsy: Technological solutions
Sensors and Microsystems [Springer, Dordrecht], Pages: 223-227
WAFER-LEVEL MEASUREMENT OF THIN FILMS THERMOELECTRIC POWER
Sensors And Microsystems [], Pages: 578-583
PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS APPLICATIONS
Sensors And Microsystems [], Pages: 267-271
A COMPUTATIONALLY EFFICIENT MODEL FOR THERMAL SENSORS SIMULATION
Sensors And Microsystems [], Pages: 152-156
HIGHLY SENSITIVE THERMOELECTRIC TRANSDUCERS WITH CMOS MATERIALS
Sensors And Microsystems [], Pages: 573-577
AN OPTIMIZED FRONT-SIDE MICROMACHINING PROCESS FOR DIELECTRIC MEMBRANES USING TMAH
Sensors And Microsystems [], Pages: 374-378