-A A +A
Surname: 
Mancarella
Firstname: 
Fulvio
Position: 
Staff
Profile: 
Researcher
Phone: 
+39 0516399120
Activity: 
Fulvio Mancarella received a M. Sc. degree in Electrical Engineering and a Ph. D. degree in Electronics and Computer Science in 2002 and 2006, respectively, both from Bologna University. Since 2009 he joined the Institute of Microelectronics and Microsystems (IMM) of the Italian National Research Council (CNR) as a scientific researcher. His research interests include technology development for the fabrication of micro-electro-mechanical systems (MEMS). Since 2003 he has been working on the development of infrared thermoelectric transducers for the 3-5 µm atmospheric window fabricated with CMOS-compatible micromachining techniques in the framework of the EU project “NETGAS” (ST-2001-37802-FP5), aiming at the realization of a photoacoustic gas sensing microsystem based on heavly-dopped polysilicon. Since January 2006, the activities for the development of sensors based on silicon microsystem has been working in the framework of the regional project (LaRIA). The activities have been focused on the development of deep silicon etching by Deep Reactive Ion Etching (D-RIE). In the same period, he has been working on the fabrication of MEMS resonant strain sensors for structural monitoring applications in the framework of the EUROCORES "Micro-measurement and Monitoring System for Ageing Underground Infrastructures - Underground M3" project funded within S3T Programme (FP6), coordinated by the University of Cambridge. Since 2007, he has been mainly working in several industrial research project funded by private companies, in the field of technology development for inkjet applications, separation system for micro gas chromatography and a feasibility study aiming at the realization of micro nozzles for biochemical application. In 2010 he has been working in a feasibility study, funded by private company and in collaboration with Università degli Studi di Milano-Bicocca, aiming at the develop of silicon-based nanostructured thermoelectric devices for power harvesting application. Since 2012 he has been working on the development of silicon photonics devices for DataCom application in the framework of FIRB project “MINOS” (Dispositivi fotonici micro- e nano-strutturati basati su silicio deformato per commutazione ultra-rapida in applicazioni datacom). In the same period, he has been working of the fabrication of power microgeneration and storage devices, in the framework of European Project (FP7-NMP-2013-SMALL-7) ”SiNERGY” (Silicon friendly materials and device solutions for microenergy applications). SKYPE ID: fulvio.mancarella

Scientific Production

Luca Belsito, Matteo Bosi, Fulvio Mancarella, Matteo Ferri, Alberto Roncaglia

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

Journal of Microelectromechanical Systems [IEEE],

Mojmír Meduňa, Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Francesco La Via, Danilo Crippa, Leo Miglio, Hans von Känel

X-ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si (0 0 1) wafers

Journal of Crystal Growth [North-Holland], Volume: 507 Pages: 70-76

Massimo Zimbone, Marcin Zielinski, Corrado Bongiorno, Cristiano Calabretta, Ruggero Anzalone, Silvia Scalese, Giuseppe Fisicaro, Antonino La Magna, Fulvio Mancarella, Francesco La Via

3C-SiC Growth on Inverted Silicon Pyramids Patterned Substrate

Materials [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 20 Pages: 3407

Mojmír Meduňa, Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Francesco La Via, Danilo Crippa, Leo Miglio, Hans von Känel

X-Ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si (001) wafers

Journal of Crystal Growth [North-Holland],

Andrea Scaccabarozzi, Simona Binetti, Maurizio Acciarri, Giovanni Isella, Roberta Campesato, Gabriele Gori, Maria Cristina Casale, Fulvio Mancarella, Michael Noack, Hans von Känel, Leo Miglio

Integration of InGaP/GaAs/Ge triple‐junction solar cells on deeply patterned silicon substrates

Progress in Photovoltaics: Research and Applications [], Volume: 24 Issue: 10 Pages: 1368-1377

Luca Belsito, Fulvio Mancarella, Alberto Roncaglia

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 26 Issue: 9 Pages: 095018

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Luca Masini, Jize Yan, Ashwin A Seshia, Kenichi Soga, Alberto Roncaglia

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Sensors and Actuators A: Physical [Elsevier], Volume: 239 Pages: 90-101

F Suriano, M Ferri, F Moscatelli, F Mancarella, L Belsito, S Solmi, A Roncaglia, Stefano Frabboni, GC Gazzadi, D Narducci

Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires

Journal of Electronic Materials [Springer US], Volume: 44 Issue: 1 Pages: 371-376

Hans von Känel, Fabio Isa, Claudiu V Falub, Eszter Judit Barthazy, Elisabeth Müller Gubler, Daniel Chrastina, Giovanni Isella, Thomas Kreiliger, Alfonso Gonzalez Taboada, Mojmir Meduna, Rolf Kaufmann, Antonia Neels, Alex Dommann, Philippe Niedermann, Fulvio Mancarella, Marco Mauceri, Marco Puglisi, Danilo Crippa, Francesco La Via, Ruggero Anzalone, Nicolo Piluso, Roberto Bergamaschini, Anna Marzegalli, Leo Miglio

Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates

ECS Transactions [The Electrochemical Society], Volume: 64 Issue: 6 Pages: 631-648

Hans von Känel, Fabio Isa, Claudiu V Falub, Eszter Judit Barthazy, Elisabeth Müller Gubler, Daniel Chrastina, Giovanni Isella, Thomas Kreiliger, Alfonso Gonzalez Taboada, Mojmir Meduna, Rolf Kaufmann, Antonia Neels, Alex Dommann, Philippe Niedermann, Fulvio Mancarella, Marco Mauceri, Marco Puglisi, Danilo Crippa, Francesco La Via, Ruggero Anzalone, Nicolo Piluso, Roberto Bergamaschini, Anna Marzegalli, Leo Miglio

(Invited) Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates

ECS Transactions [The Electrochemical Society], Volume: 64 Issue: 6 Pages: 631-648

L Belsito, E Vannacci, F Mancarella, M Ferri, G P Veronese, E Biagi, A Roncaglia

Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 24 Issue: 8 Pages: 085003

E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, E Biagi

Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology

Biomedical microdevices [Springer US], Volume: 16 Issue: 3 Pages: 415-426

AG Taboada, T Kreiliger, CV Falub, F Isa, M Salvalaglio, L Wewior, D Fuster, M Richter, E Uccelli, P Niedermann, A Neels, F Mancarella, B Alén, L Miglio, A Dommann, Giovanni Isella, H von Känel

Strain relaxation of GaAs/Ge crystals on patterned Si substrates

Applied Physics Letters [AIP], Volume: 104 Issue: 2 Pages: 022112

Dario Narducci, Gianfranco Cerofolini, Matteo Ferri, Francesco Suriano, Fulvio Mancarella, Luca Belsito, Sandro Solmi, Alberto Roncaglia

Phonon scattering enhancement in silicon nanolayers

Journal of materials science [Springer US], Volume: 48 Issue: 7 Pages: 2779-2784

Simone Sugliania, Pietro De Nicolaa, Giovanni Battista Montanaria, Alessio Nubilea, Angela Menina, Fulvio Mancarellab, Paolo Verganic, Andrea Meronic, Marco Astolfic, Marco Borsettoc, Guido Consonnic, Roberto Longonec, Marco Chiarinia, Marco Bianconia, Gian Giuseppe Bentinia

High quality surface micromachining of LiNbO3 by ion implantation-assisted etching

Proc. of SPIE Vol [], Volume: 8612 Pages: 86120E-1

Matteo Ferri, Fulvio Mancarella, Ashwin Seshia, James Ransley, Kenichi Soga, Jan Zalesky, Alberto Roncaglia

Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures

Smart Structures and Systems [], Volume: 6 Issue: 3 Pages: 225-238

Matteo Ferri, F Mancarell, Luca Belsito, Alberto Roncaglia, Jize Yan, Ashwin A Seshia, Kenichi Soga, J Zalesky

Strain sensing on steel surfaces using vacuum packaged MEMS resonators

Procedia Engineering [Elsevier], Volume: 5 Pages: 1426-1429

Matteo Ferri, Fulvio Mancarella, Ashwin Seshia, James Ransley, Kenichi Soga, Jan Zalesky, Alberto Roncaglia

Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures

Smart Structures and Systems [], Volume: 6 Issue: 4 Pages: 225-238

F MANCARELLA, A RONCAGLIA, S CRISTIANI

PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS

Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006 [World Scientific], Pages: 267

A Roncaglia, F Mancarella, GC Cardinali

CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5μm atmospheric window

Sensors and Actuators B: Chemical [Elsevier], Volume: 125 Issue: 1 Pages: 214-223

Fulvio Mancarella, Alberto Roncaglia, Gian Carlo Cardinali

A measurement technique for thermoelectric power of CMOS layers at the wafer level

Sensors and Actuators A: Physical [Elsevier], Volume: 132 Issue: 1 Pages: 289-295

F MANCARELLA, A RONCAGLIA

FOR DIELECTRIC MEMBRANES USINGTMAH'

Sensors And Microsystems-Proceedings Of The 9th Italian Conference [World Scientific], Pages: 373

Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Francesco La Via, Danilo Crippa, Wlodek Kaplan, Adolf Schöner, Anna Marzegalli, Leo Miglio, Hans von Känel

3C-SiC Epitaxy on Deeply Patterned Si (111) Substrates

Materials Science Forum [Trans Tech Publications], Volume: 858 Pages: 151-154

Mojmír Meduňa, Thomas Kreiliger, Ivan Prieto, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Francesco La Via, Danilo Crippa, Leo Miglio, Hans von Känel

Stacking Fault Analysis of Epitaxial 3C-SiC on Si (001) Ridges

Materials Science Forum [Trans Tech Publications], Volume: 858 Pages: 147-150

Hans von Känel, Leo Miglio, Danilo Crippa, Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Ruggero Anzalone, Nicolo’ Piluso, Francesco La Via

Defect Reduction in Epitaxial 3C-SiC on Si (001) and Si (111) by Deep Substrate Patterning

Materials Science Forum [Trans Tech Publications], Volume: 821 Pages: 193-196

L Miglio, R Bergamaschini, S Bietti, E Bonera, E Grilli, M Guzzi, A Marzegalli, F Montalenti, F Pezzoli, M Salvalaglio, S Sanguinetti, A Scaccabarozzi, C Falub, F Isa, T Kreiliger, A Taboada, D Chrastina, I Frigerio, G Isella, M Meduna, L Wewior, D Fuster, B Alen, M Bollani, A Dommann, A Neels, P Niedermann, C Frigeri, J Fompeyrine, M Richter, E Uccelli, F Mancarella, H von Kanel

Epitaxial self-assembly of 3-D semiconductor structures on deeply patterned Si substrates at the microscale

International conference on quantum dots (QD-2014)-May 11‐16 [],

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, Kenichi Soga

High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) [IEEE], Pages: 992-995

M Ferri, F Suriano, F Mancarella, L Belsito, S Solmi, A Roncaglia, D Narducci, G Cerofolini

Fabrication and Thermoelectric Characterization of Surface-Micromachined Silicon Nanowires

E-MRS 2012 Spring Meeting-May 14-18 [FR],

L Belsito, F Mancarella, M Ferri, A Roncaglia, E Biagi, S Cerbai, L Masotti, G Masetti, N Speciale

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 594-597

Matteo Ferri, Luca Belsito, Fulvio Mancarella, Luca Masini, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, J Zalesky, K Soga

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1056-1059

M Ferri, F Mancarella, J Yan, JE-Y Lee, AA Seshia, J Zalesky, K Soga, A Roncaglia

Design and prototyping of a MEMS-based crackmeter for structural monitoring

TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 315-318

Matteo Ferri, Fulvio Mancarella, Alberto Roncaglia, James Ransley, Jize Yan, Ashwin Seshia

Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique

SENSORS, 2008 IEEE [IEEE], Pages: 1131-1134

Lucia Bissi, Pisana Placidi, Michele Cicioni, Andrea Scorzoni, Fulvio Mancarella, Stefano Zampolli

Direct detection of DNA sequences based on capacitance measurements through a configurable mixed-signal architecture

2008 15th IEEE International Conference on Electronics, Circuits and Systems [IEEE], Pages: 89-92

A Roncaglia, E Cozzani, F Mancarella, M Passini, GC Cardinali, M Severi

Influence of air heat exchange upon on-chip measurement of thermal conductivity using mems test structures

TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 615-618

F MANCARELLA, A RONCAGLIA, M PASSINI, GC CARDINALI, M SEVERI

A COMPUTATIONALLY EFFICIENT MODEL FOR THERMAL SENSORS SIMULATION

Sensors And Microsystems [], Pages: 152-156

F MANCARELLA, A RONCAGLIA, GC CARDINALI, G PIZZOCHERO, S GUERRI, M SEVERI

HIGHLY SENSITIVE THERMOELECTRIC TRANSDUCERS WITH CMOS MATERIALS

Sensors And Microsystems [], Pages: 573-577

F MANCARELLA, A RONCAGLIA, S CRISTIANI, GC CARDINALI, M SEVERI

PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS APPLICATIONS

Sensors And Microsystems [], Pages: 267-271

Fulvio Mancarella, Ivan Elmi, Stefano Zampolli, Antonella Poggi, Giancarlo Cardinalli, Maddalena Belluce, Stefano Galli, Mario Galli, Filippo Baravelli

Method For Making A Silicon Separation Microcolumn For Chromatography Or Gas Chromatography

US20140138351 [],